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High purity metal-organic source
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LED epitaxial material - MO source
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+
CBr4
→
Cp2Fe
Cp2Mg
Triethyl Gallium (TEGa)
Trimethyl indium (TMIn)
Trimethyl aluminum (TMAL)
Trimethylgallium (TMGa)
Triethyl phosphate (TEPO)
Ethyl orthosilicate (TEOS)
Tetra (dimethylamine) titanium (TDMAT)
Triethyl borate (TMB)
Environmental display